XE-150 
                     High Accuracy Large Sample SPM
             
             
                         User’s Manual 
             
             
                      Preliminary 
             
                            Version 1.7 
                                 
                                 
                     Copyright © 2007 Park Systems Corporation. 
                           All rights reserved.
                                 
                
                
                
                                           Notice 
               This manual is copyrighted by Park Systems Corp. with all rights reserved. This 
               manual may not be reproduced in any form or translated into any other language, in 
               whole or in part, without written permission from Park Systems Corp. 
                
               Park Systems is not responsible for any mistakes or damages that may occur either 
               accidentally or willfully, as a result of using this manual. 
                
               Park Systems is not responsible for typographical errors. This manual may be 
               changed without prior notice, and it will be examined and revised regularly. 
                
               We welcome any user feedback that may result in future improvements to the quality 
               of this manual. If you have any suggestions, please contact Park Systems. 
                   
                                                             Park Systems Corp 
                
                                                               KANC 4F lui-Dong 906-10 
                                                                                
                                                                 Suwon, Korea 443-766 
                                                                                
                                                                  Ph +82-31-546-6800 
                                                                                
                                                                Fax +82-31-546-6805~7 
                                                                                
                                                           Homepage: www.parkafm.co.kr 
                                                                                
                                                              Park Systems Inc 
                                                                      3040 Olcott St. 
                                                                 Santa Clara, CA 95054 
                                                                    Ph 408-986-1110 
                                                                    Fax 408-986-1199 
                                                            Homepage: www.parkafm.com 
                                                                                
                                                                                
                   
                                                                    
                                                                    
                                                                    
                                     Preface 
                The Scanning Probe Microscope (SPM) is not only at the top of the list of equipment 
                pioneering the nano scale world, it is also the most fundamental technology. 
                Succeeding the first generation optical microscope, and the second generation 
                electron microscope, the SPM has every right to be known as a “third generation” 
                microscope since it enables us to look into the nano scale world. At the same time it 
                has many advantages over manual microscopes which passively look at the samples. 
                The SPM is like a miniature robot, fabricating specific structures by manipulating 
                atoms on the sample surface and using a probe tip to take measurements of those 
                structures. 
                 
                The SPM originated with the invention of the Scanning Tunneling microscope (STM). 
                The STM uses a tunneling current between a probe tip and a sample in a vacuum 
                state to measure surface topography. As a result, it is limited in that it can only 
                measure a sample which is a conductor or a semiconductor. Once the Atomic Force 
                Microscope (AFM) was developed, however, a whole new range of measurement 
                capabilities became possible. Now it is not only possible to measure non-conductors 
                in air, but also to measure the physical, chemical, mechanical, electrical, and 
                magnetic properties of a sample’s surface, and even measure live cells in solution.  
                 
                The SPM is indeed the key to entering the world of nano technology that has yet to 
                flourish, and it is essential equipment for various research in the basic sciences – 
                physics, chemistry, and biology - and in applied industry - mechanical and electrical 
                engineering.  
                 
                The importance of the SPM stands only to grow greater and greater in the future.