Outlines
     Definition
     Scanning Probe Microscopes (SPMs)
     Scanning Probe Lithography
     Conclusions
                               
     Definition: Lithography
   Greek Lithos: stone
   Printing process in which the “
   image to be printed is rendered 
   on a flat surface, and treated to 
   retain ink while the nonimage 
   .”areas are treated to repel ink
                                                          "Girl with Flowers", 
   (The American Heritage® Dictionary of the English      Lithography by Angel 
      Language, Fourth Edition Copyright © 2004)          Botello (1980)
                                         
     Definition: Scanning Probe 
     Lithography
      Scanning probe lithography: 
     Lithography using a sharp tip in 
     proximity to a sample to 
     pattern nanometer-scale 
     features
                                                   100-nm-wide, 2-nm-thick spiral 
      Instrument:                                 of polymer (poly(ethyl)amine)
                                                   (Lloyd Whitman, 
     Scanning Probe Microscope                     US Naval Research 1100)
                                         
    Scanning Probe Microscope 
    (SPMs)
     Monitor local interactions between a tip and a 
      sample
     Physical, electrical or chemical information
     Types of SPMs: 
      Scanning Tunneling Microscope
      Atomic Force Microscope
                               
     SPMs: Scanning Tunneling 
     Microscope
      Voltage bias between tip 
        and sample
      Electrons tunnel between 
        two electrodes
      Current sensitive to the 
        distance
          _______________
      Resolution: atomic scale
      Vacuum needed
      Substrate: conductive
                                            Scanning tunneling microscope 
                                            (Ludwig-Maximilians-Universität, 
                                            München, W.M. Heckel)